The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this study, the crystallinity of electroplated copper thin-film interconnections on Cu and Ru seed layers before and after EM (Electro migration) test was evaluated by an EBSD (Electron Back-scattered Diffraction). The EM resistance of the interconnection on the Ru seed layer was improved drastically compared with that on the Cu one. EBSD analyses revealed that the crystallinity of the interconnection...
Effect of the micro texture of electroplated copper thin film interconnections on stress-induced migration was investigated experimentally and theoretically. The micro texture of electroplated copper thin films changed drastically as a function of the annealing temperature after the electroplating. However, stress-induced migration was activated even though the thin film interconnection was kept at...
The degradation process of the crystallinity of electroplated copper thin films, which are used for interconnections and micro bumps for 3D integration, during electromigration and stress-induced migration tests was observed clearly by applying an EBSD method. The grain boundary diffusion was the main reason for the degradation of the crystallographic quality in both grain boundaries and grains. The...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.