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The analysis of single-layer and multi-layer nitride coatings based on refractory metals V and Ta was conducted. The magnetron deposition based on direct current and targets of the V and Ta with a purity of 99,995 % were used to create the coating samples. The coating deposition was performed in an atmosphere of Ar/N2 mixture at a substrate bias voltage from 0 to 150 V. The changes of the ratio flow...
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