The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Optical microscopy is one of the most important scientific achievements in the history of mankind, and it is the most widely used technique for exploring the small world. However, as is well known, traditional lens-based optical microscopes suffer from the low imaging resolution λ/2 due to the diffraction limit. To overcome this obstacle, multiple innovative methods have been proposed during the past...
The dual-primal finite-element and interconnecting algorithm (FETI-DP) is efficiently applied in parallel to compute the far-field scattering from a wafer with sub-wavelength patterns. As a nonoverlapping domain decomposition method for solving large-scale problems, the FETI-DP algorithm formulates a global interface problem, whose iterative solution is accelerated by solving a global corner problem...
Despite a diffraction limited lateral resolution of 360 nm, we detected 20 nm by 110 nm defects in a patterned 22 nm node wafer using quantitative phase and amplitude images from epiillumination diffraction phase microscopy.
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.