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A new array structure to detect the soft failure of resistive elements is reported. By adding terminals to sense local potentials and high pass filtering a bit map image, it becomes possible to detect soft failure. Thanks to a simplified peripheral circuit, the layout area is drastically reduced and an aging test with overcurrent becomes possible.
We introduce a new addressable test structure array using for mass production stage which is compacted doubly nesting array into Narrow Scribe Line which named as High sensitivity-Screening and Detection-decoder test structure in Scribe line (HSD-S). Abnormally high resistance as a soft failure via was detected and located in a 40nm CMOS technology. We captured a soft failure bit which had a high...
We report newly developed Test-Element-Group for detecting soft failures of low-resistance-element like interconnect via using doubly nesting array. We detected the soft failure of fine via which resistance had about 10 times larger resistance than normal via using this structure manufactured in 40nm CMOS technology.
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