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This paper reports an evaluation of electromechanical properties of the tunable plasmonic color filter by means of a nanomechanical in-plane motion of free-standing Al subwavelength grating. The maximum 707 nm pitch expansion was obtained at an applied voltage of 60 V, which provides a continuous peak shift of transmitted light. The frequency response was achieved up to 1 kHz.
Micro-electro-mechanical systems (MEMS) technology can offer a viable alternative to realize miniaturized and less expensive actuators for deformable mirror in adaptive optics to obtain high resolution retinal imaging. During fabrication of such devices, functional multilayered thin films are deposited at elevated temperatures. These films are therefore subjected to residual stresses which may result...
In this paper, a novel radio frequency (RF) induced power supply system for micro sensor nodes is presented. Supplied power in RF-electromagnetic wave is received and rectified in each micro sensor device. A charge pump (CP) circuit boosts up an output voltage of the received power, and stores the energy in a large capacitor. When the boost up voltage of CP circuit reaches to an arbitrary voltage,...
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