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In today's digital and information-based manufacturing environment, data are basic elements for almost every production control and management activity. This paper focuses on production data processing based on attribute analysis. There are thousands of attributes in semiconductor manufacturing. However, some of them are irrelevant and/or redundant to some optimal production control and management...
In this paper, cycle time prediction of wafer lots is studied. A memetic algorithm called GSMPSO by combining the PSO with a Gaussian mutation operator and a Simulated Annealing (SA)-based local search operator is developed to weight the features for K Nearest Neighbors (KNN) regression. The GSMPSO-KNN regression method is used to predict the cycle time of wafer lots. The experiment result demonstrates...
A novel learning algorithm is proposed for nonlinear modelling and identification using radial basis function neural networks. The proposed method simplifies neural network training through the use of an adaptive computation algorithm (ACA). In addition, the convergence of the ACA is analyzed by the Lyapunov criterion. The proposed algorithm offers two important advantages. First, the model performance...
This paper integrates the ideas of “divide and conquer” and “put the heads together”, and proposes a method of selecting sub-networks on-line based on fuzzy decision-making. For a given input, this method calculates the distances between the input and the centers of sub-networks firstly, and then obtains the fuzzy member degree based on distance measure, finally realizes on-line sub-networks selection...
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