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Based on the analysis on the scheduling characteristics of the semiconductor manufacturing fabrication lines, we propose a TOC(Theory-of-Constraints) combining ACO(Ant Colony Optimization) sequencing method. The method firstly determines the bottlenecks of a semiconductor manufacturing fabrication line, and then applies an ACO algorithm to obtain the optimized jobs processing priority sequence of...
In this paper, it is firstly noted that the scheduling of a semiconductor wafer fabrication facility (fab) has its special complexities, such as large scale, a mixed of different processing types, unbalanced production facilities, short-term efficient scheduling period, non-zero state at the decision point time, etc. Secondly, the scheduling model for a wafer fab, composed of a machine set, a task...
This research is motivated by the scheduling problem in the diffusion and oxidation operations of semiconductor wafer fabrication facilities (fabs), where one machine is modeled as a single batch processing machine. The objective is to minimize the total weighted tardiness (TWT) on a single batch processing machine (BPM) with incompatible lot families and dynamic lot arrivals, with consideration on...
This research is motivated by the qual-run requirements of Advance Process Control(APC) opposite setups of scheduling in semiconductor manufacturing. The objective is to analyze the impact of the qual-run requirements of APC on the scheduling performance (e.g. the Total Weighted Tardiness (TWT) and makespan)with a number of experiments. Taking parallel machines for example, we propose an Ant Colony...
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