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This paper presents a single antenna platform steered by an external magnetic field where a monolithic microwave integrated circuit (MMIC) and capacitors are vertically integrated. Unique process skills are successfully optimized to implement a newly proposed microelectromechanical systems antenna. A silicon grid is patterned on the processing wafer to prevent the destruction of the antenna by benzocyclobutene...
This paper presents the new concept of RF MEMS silicon contact switch and its verification for high isolation at 50-110 GHz. A high isolation is achieved by locating the floating top contact electrode 30 ??m apart from the bottom coplanar waveguide (CPW) signal line in lateral direction at initial off-state. The switch contact is realized by the dual axis movement, namely a lateral movement by comb...
This paper presents a single antenna platform mechanically steered by magnetic force in which MMIC (Monolithic Microwave Integrated Circuit) and capacitors are fully integrated. The RF source, MMIC is vertically connected to the antenna plate, not on the BCB spring, so the antenna responses are not distorted with various tilting angles. A single MMIC is flip-chip bonded to increase productivity and...
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