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Mechanical properties of micro/nanoscale structures are needed to design reliable micro/nanoelectromechanical systems (MEMS/NEMS). Micro/nanomechanical characterization of bulk materials of undoped single-crystal silicon and thin films of undoped polysilicon, SiO 2 , SiC, Ni-P, and Au have been carried out. Hardness, elastic modulus and scratch resistance of these materials were measured by...
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