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We proposed a micro electrode fabrication method by a metal inkjet printing technology for the bio-applications of dielectrophoresis (DEP). The electrodes are composed of bottom planar gold (Au) electrodes and three dimensional (3D) silver (Ag) electrodes fabricated locally on the Au electrode through metal inkjet printing. We observed the negative DEP characteristics of the 4 μm polystyrene beads...
This paper presents the charging mitigation method at single crystalline silicon micromirror by means of improving the geometry around electrodes. We have now determined that tilt angle drift and stiction are due to the charging effect, and that the effect can be enormously reduced by floating field limiting shields around the electrodes and dielectric geometry. While 0.5 degrees drift was measured...
In this paper, we describe pull-in voltage measurement technique and results for the uniformity characterization of torsional micromirror arrays (MMAs). A simple measurement scheme using two illuminators and image processing was implemented. The MMAs were fabricated using two kinds of substrate; silicon on glass (SiOG) and silicon on insulator (SOI) wafers. Pull-in voltage distributions are presented,...
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