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This contribution proposes a method to extract parametric reduced models that describe the coupled structural-electric behavior of RF MEMS switches. The equivalent capacitance coefficients and the effective elastic coefficients are extracted from coupled structural-electrostatic analysis. Parametric models are built based on the sensitivities of the extracted equivalent coefficients. The method is...
The paper presents parametrized model of RF (radio frequency) MEMS (micro-electro-mechanical-systems) capacitive switch in the form of 1D equivalent circuits, prepared in the APLAC software. The model can be applied to obtain static, multiphysics, nonlinear characteristics and to calculate pull-in voltage of the switch. The parametrization concerns geometrical parameters (beam length and static gap...
This paper investigates the extraction of lumped parameters (elastic coefficient and effective mass) for RF MEMS switches. The extraction starts from field simulations obtained with the finite element method, which solves strongly coupled structural-electrostatic field problems, and is based on least square fitting. The elastic coefficients are extracted from static coupled simulations, whereas the...
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