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The Cr-doped hydrogen-GLC films were prepared by a hybrid magnetron sputtering system composed of a direct current magnetron sputtering (DC-MS) source of carbon and a high power impulse magnetron sputtering (HIPIMS) source of Cr with reactive gas of C 2 H 2 . The hydrogen-free GLC and Cr-doped GLC films were also prepared for comparison. The influence of substrate bias on the Cr-doped...
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