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Optical circuit switches with fast switching times can provide rapidly reconfigurable bandwidth in data center networks. Silicon photonic switches are attractive candidates with their fast response times and CMOS process compatibility. In this paper, we report on a 50 × 50 silicon photonic switch with MEMS-actuated vertical adiabatic couplers. The switch is monolithically integrated on a 7.6 × 7.6...
Highly integrated optical circuit switch (OCS) with large port counts (∼100×100) is achievable by combining silicon photonics and MEMS technologies. We will review the design trade-offs, performance scaling, and the current state of the art.
We report on high-port-count (50×50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.
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