The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This study focuses on explaining differences in soft X-ray reflectivity observed for Mo/Si multilayers produced by e-beam evaporation with two different additional methods: ion etching of the Si layer and optimization of the substrate temperature during deposition. A 32-period multilayer made with ion etching has a near normal incidence reflectivity of 50%, while the one made at an optimum deposition...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.