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A highly efficient millimeter-wave (mmW)/Terahertz (THz) dielectric antenna is proposed. The proposed suspended tapered antenna [made of high resistivity silicon (Si)] is fabricated in a new mmW/THz integrated technology platform called silicon-on-glass (SOG). The fabrication process makes the tapered antenna with deep reactive ion etching of the Si layer of the SOG platform, wherein a part of the...
This paper presents a high-efficiency tapered dielectric antenna made of high-resistivity Silicon (Si). The antenna is designed based on a compromise between the high-gain and short length. The fabrication process is based on photolithography and dry etching which are well-known techniques in the Si-based fabrication technology. The proposed antenna is compatible with the millimeter-wave integrated...
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