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An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold electrodes to ensure a low series resistance, the high quality factors of 317 and 63 at 1 GHz were measured for the minimum and maximum capacitances, respectively...
The design, simulation and fabrication of high-Q zipping MEMS varactors is presented. A novel, stable zipping design allows continuous tuning as well as a large tuning range. High quality factors can be obtained using gold electrodes in order to minimise series resistance. By incorporating a high-permittivity dielectric in the varactor, the tuning range can be greatly increased and at the same time,...
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