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This paper deals with the management of vehicles in the Automated Material Handling System of a semiconductor wafer fabrication facility. Vehicle management policies (allocation of vehicles to transport requests, positioning of idle vehicles,…) strongly impact critical performance indicators, among them the allocation time (delivery time) and the lot cycle time. In the literature, most studies on...
As modern manufacturing technology progresses, measurement tools become scarce resources since more and longer control operations are required. It thus becomes critical to decide whether a lot should be measured or not in order to get as much information as possible on production tools or processes, and to avoid ineffective measurements. To minimize risks and optimize measurement capacity, a smart...
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