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In this paper, polymer-based microcryogenic cooler (MCC) cold stages, each with a footprint of 17 mm 5 mm, have been successfully developed and tested. The MCC cold stage consists of a polyimide heat exchanger (HX) which is monolithically manufactured on a silicon substrate by using a polyimide/copper microelectromechanical systems process and a silicon/glass Joule–Thomson (J–T) valve which...
We present here a new surface-micromachined, all-parylene (para-xylylene), in-channel, normally-closed pop-up checkvalve with a designable cracking pressure. The cracking pressure is created by the mechanical residual tensile stress introduced by a popping mechanism. Moreover, an even higher cracking pressure can be achieved by thermal annealing before popping, which adds another degree of freedom...
One of the smallest Joule Thomson (J-T) micro cryogenic coolers (MCC) utilizing a hollow-core fiber-based heat exchanger (HX) is designed, fabricated, assembled and tested. Techniques that control mask material etching are developed to fabricate a multi-layer silicon structure on HX-coupling manifolds. A segmental metal coating is applied on the fibers and the capillary for solderable areas and reduced...
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