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In this paper, a novel decoupled 5-DOF flexure-based register system is proposed to achieve the improvement of registration accuracy, which is a key indicator to measure the performance for Multilayer Roll-to-roll Printed Electronics (MR2RPE) equipment. The register system consists of 4-DOF compliant Support Mechanism and 1-DOF compliant Platform, each comprising some flexure-beam prismatic joints...
Overlay alignment is a key technology in multi-layer Roll-to-Roll inkjet Printing. To eliminate or reduce the defects, an active compensation compliant mechanism is proposed to compensate the errors occurred during production. The mechanism consists of four parts which provide the printhead 5 DOFs to compensate errors actively. In this paper, the design of the whole device is presented. The kinematics...
Micrograsping devices and methodologies play an important role in the performance of high precision positioning systems as they contact the objects to be grasped directly. The polarization maintaining optical fiber's asymmetry structure generated a polarization axial, so rotational alignment is an extremely important issue to be concerned. To fulfill the demand of grasp and rotation in optical fiber's...
High precision rotational alignment is of key importance in micro/nanopositioning or micromanipulating applications. This paper presents a novel rotary micropositioning stage with remote center of motion (RCM) characteristic. Compared with conventional rotary guiding mechanism, the proposed double-parallelogram mechanism (DPM) possesses pure rotational motion along with a compact structure. Based...
This paper presents the design and modeling methodologies of a novel flexure-based positioning stage with capable of traveling along two translational directions. A 4-PP parallel configuration is utilized to implement two planar translational motions. Each prismatic joint is achieved using a translational flexure hinge with a large deformation for smooth motion. The two layers are assembled in a top-down...
With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated...
Nanoimprint Lithography (NIL) is an emerging alternative lithography technology that can be repeated to print nanometer-scale geometries which have very good uniformity and repeatability. The compliant mechanism is a novel mechanism which has been utilized in many accurate mechanisms and precise instruments because of its obvious advantages such as easy assembly, zero friction, zero lubrication, low...
A novel design of passive spherical metamorphic joint is proposed in this paper, the special mechanism of this design allows multi links to be connected together to do spherical motion about a rotation center. The main contribution of the joint design is the offset parallelogram mechanism and a couple door joints, which can overcomes efficiently the inherent defect from the conventional spherical...
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