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Synchrotron radiation has been employed to analyze the difference in three representative kinds of spin on glass (SOG) films systematically based on a small angle X-ray scattering (SAXS) technique. The amount of scattering by pores in a SOG film of organic non-template type was found to be extremely smaller than that in low-k films of a template type. The pore size in the organic non-template type...
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