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Back‐contacted, ultrathin (<10 µm), and submillimeter‐sized solar cells made with microsystem tools are a new type of cell that has not been optimized for performance. The literature reports efficiencies up to 15% using thicknesses of 14 µm and cell sizes of 250 µm. In this paper, we present the design, conditions, and fabrication parameters necessary to optimize these devices. The optimization...
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