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This paper reports ultra-wide tuned RF micro-electro mechanical systems (MEMS) tunable capacitor using netted membrane structure for highly miniaturized and reconfigurable RF devices and systems applications. The proposed capacitor is also designed to achieve high linearity and capacitance values for commercial applications. Since the netted membrane is stuck to the dielectric layer of the bottom...
In this paper, integrated air-suspended inductors were newly developed on silicon substrate for on-chip radio frequency (RF) circuit and system applications. For the improvement of Q-factors and self-resonant frequencies of the integrated inductors, they were designed and fabricated by using air-suspended spiral conductor lines, photoresist sacrificial layer, and electroplating technique. For forming...
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