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High power DPSS UV lasers having high repetition rates (>100 kHz) are significant part of the cost of a laser Si micro-processing system. An alternative inexpensive solution, MOPA based IR fiber lasers, have been used to machine Si with high energy shaped pulses. This investigation evaluates the single pulse machining performance of a pulse shapeable IR (1062 nm) fiber laser and a DPSS UV (355...
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