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Wafer defect inspection is an important process that is performed before die packaging. Conventional wafer inspections are usually performed using human visual judgment. A large number of people visually inspect wafers and hand-mark the defective regions. This requires considerable personnel resources and misjudgment may be introduced due to human fatigue. In order to overcome these shortcomings,...
Automatic visual inspection of defects plays an important role in industrial manufacturing with the benefits of low-cost and high accuracy. In light-emitting diode (LED) manufacturing, each die on the LED wafer must be inspected to determine whether it has defects or not. Therefore, detection of defective regions is a significant issue to discuss. In this paper, a new approach for inspection of LED...
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