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Quite a few MEMS devices need vacuum packaging technology to guarantee the desirable performance. Developing an absolute vacuum environment for those devices is indispensable. However, it is difficult to monitor the pressure change in vacuum chamber in on-line and real-time mode. A surface micro-machined Pirani gauge for measuring vacuum pressure inside vacuum packaging in wafer level was presented...
With the rapid development of micro-electro-mechanical system (MEMS), it is indispensable to investigate dynamic characteristics of MEMS. Characteristics of conventional modal testing technology includes excitation of the structure via a function of known frequency characteristics using an impact hammer or an exciter, and measuring the associated response using force or motion sensors. Due to small...
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