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Low cost and low power consumption are key factors to the spreading of microsystems into the everyday life tools. Fluxgate magnetometer systems still request such an improvement. This paper presents compact thin film microfluxgate sensors working in the range of tenths of kHz to tenths of MHz which exhibit improved factor of merit (FOM) in the high frequency range when the sensor size is reduced....
Cost and power consumption are key factors to the spreading of microsystems into the everyday life tools. Fluxgate sensor based magnetometer systems still request such an improvement. This paper presents thin film sensor measured up to 20 MHz for a first device with solenoid coils wounded around cores made of thin monolayer of soft magnetic sputtered Ni82Fe18. Devices with laminated cores were measured...
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