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Anomalous responses of acoustic humidity sensors coated with mesoporous titania have been observed at high humidity levels, due to capillary contraction that alters the film mechanical behavior. As the methods commonly used to assess the elasticity of thin films are difficult to apply during sorption, a dedicated method for the characterization of the variations of the elastic shear modulus of thin...
Love wave gas sensors with mesoporous thin film as sensitive layers are presented. They are dedicated to volatile organic compound vapor detection. Mesoporous films of SiO2 were prepared using the sol-gel process and deposited on the devices acoustic path. The obtained films have been characterized by ellipsometry resulting in the determination of porosity and pore size distribution in the film and...
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