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There are increasing demands for nano-scale plasma processing such as nano-particle generation, oxide etching, and high quality thin film deposition as the microelectronics industry grows rapidly. Under very low-pressure condition (up to a few mTorr), it is difficult to generate and maintain plasmas, and therefore it is important to understand the properties of neutral gas flow together. In this study,...
Plasma display with large cell size is gaining attention for the application of large outdoor public and transparent display. In the previous work, it has been shown that the efficacy of opposite discharge reaches to 18 lm/W, while that of surface discharge is about 5 lm/W.[1,2] As a follow-up research, discharge properties of PDP cell having diagonally opposite electrode have been investigated in...
Microplasmas generated within cavities having the form of a truncated paraboloid, introduced by Kim et al. [Appl. Phys. Lett. 94, 011503 (2009)], have been simulated numerically with a two-dimensional, fluid computational model. Microcavities with parabolic sidewalls, fabricated in nanoporous alumina (Al2O3) and having upper (primary emitter) and lower apertures of 150 µm and 70 µm in diameter, respectively,...
Recently, the needs of integrated system for micro-machining and measurement have been increased with the appearance of micro-factory system. For boring electro-conductive high hardness material such as tungsten carbide (WC), an electrical discharge machining (EDM) is much more practical than conventional machining to bore these materials since hardness is not a dominant parameter in EDM. In this...
A high efficacy alternating current plasma display panel (PDP) utilizing vertically raised multilayer bus electrodes (MBE) is simulated by using a three-dimensional fluid code for the investigation of the effects of cell structures on the discharge characteristics of a PDP cell. The raised bus electrodes provide an opposite discharge mode with a low discharge current in a relatively long gap, and...
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