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New surface texturing method including formation of inverted pyramids has been further investigated in this study. Electroless deposition of Ag particles as metal catalyst in HF/H2O2 etching solution is found to be efficient for drilling nano-size holes into c-Si or m-Si. After etching back by KOH solution, the inverted pyramids structure gradually appears in c-Si (100) surface. Although the m-Si...
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