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A design of a passive damping controller to damp first resonant mode of a piezoelectric tube scanner (PTS) used in most commercial atomic force microscopes (AFMs) for nanopositioning is proposed in this paper. The stability analysis between the proposed controller and PTS is presented by an analytical framework which examines the finite-gain stability for a positive feedback interconnection between...
This paper presents a design of a controller using two velocity feedback controllers (VFCs) and an integral controller for a piezoelectric tube scanner (PTS) of an atomic force microscope (AFM) to improve the high speed imaging performance of the AFM by damping the first resonant mode of the PTS and increasing the bandwidth of the closed-loop system. The design of VFC to damp the first resonant mode...
The imaging performance of the atomic force microscope (AFM) in higher scanning speed is limited to the one percent of the first resonant frequency of it's scanning unit i.e., piezoelectric tube scanner (PTS). In order to speed up the functioning of the AFM for high speed imaging, a resonant controller with an integral action has been applied in the both x and y axis of the PTS for damping the resonant...
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