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In a High-Mix/Low-Volume (HM/LV) 300mm wafer fab, several hundred product routes are active, each with dozens of Time Constraint Tunnels (TCT), the management of which has become a real challenge. In order to help addressing the difficulties it poses, a Decision Support System (DSS) dedicated to managing Line Stops of Time Constraint Tunnels (TCT) is presented in this paper. The proposed DSS is able...
In a High-Mix/Low-Volume (HM/LV) 300mm wafer fab, several hundred product routes are active, each with dozens of Time Constraint Tunnels (TCT), the management of which has become a real challenge. In order to help addressing the difficulties it poses, a Decision Support System (DSS) dedicated to managing Line Stops of Time Constraint Tunnels (TCT) is presented in this paper. The proposed DSS is able...
The coupling of process control and production scheduling will grow tight in future fab and products. Such a trend requires integration to reduce fab cost and to improve fab effectiveness in terms of product yield and throughput performance. By focusing on the individual tool productivity, this research proposes Generalized Overall Equipment Effectiveness (GOEE). The generalization first develops...
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