The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.
In laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature...
The Femtoprint project uses femtosecond lasers to develop a printer for micro-/nano-scale systems. Femtoprint provides a large community of users with the capability of producing their own micro-systems, in a rapid-manner without the need for expensive infrastructures and specific expertise.
Material processing with ultrafast lasers has attracted considerable interest due to a wide range of applications ranging from laser surgery and integrated optics to optical data storage, 3D micro- and nano-structuring [1,2]. A decade ago it has been discovered that under certain irradiation conditions ordered sub-wavelength structures with features smaller than 20 nm can be formed in the volume of...
Femtosecond pulses focused in glass substrate induces various modifications in the material depending on the fluence level and laser exposure conditions. Upon increasing pulse energies above the energy threshold for non-linear absorption, femtosecond laser exposure leads respectively, to an increase of the refractive index [1], the formation of nano-gratings [2] or to micro-explosions [3]. The intensity...
Microsystems perform sophisticated tasks in miniaturized volumes. Shaping or analyzing light signals, mixing ultra-small volumes of chemicals, sensing mechanical signals, manipulating micro-objects, sequencing bio-molecules are common operations that can be done by these tiny machines. To further advance the field, there is a growing interest for integrated manufacturing platform where optics, fluid...
We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation...
Low-energy femtosecond laser pulses can be used to introduce various functionalities in fused silica that can be combined or distributed to form integrated microsystems suitable for optofluidics and optomechanics applications.
An ultrafast laser processing of glass for MEMS and micro-fluidic application was presented in this paper. A low energy pulse, with an average power of 250 mW was used to write in the bulk microdevice contour along with the optical functions. The nature of the structural changes such as thermal conductivity changes was discussed in this paper from the view-point of laser processing of microdevices...
Manipulation and assembly tasks associated with micro-systems, biotechnology, and product miniaturization demand that robots increasingly operate at microscopic dimensions. This paper discusses a new microscope design, called the adaptive scanning optical microscope (ASOM), that is particularly suitable for observing robotic activities at the micron scale. The ASOM combines a custom designed scanner...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.