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The qualitative and quantitative detection of the gas mixture has significance meaning in the field, such as environmental protection, industrial control and poison gas alarm. However, the traditional semiconductor gas sensors have the defect of cross-sensitivity when measure the gas mixture. We designed a four-array MEMS gas sensor in order to overcome this defect, it could form a high-dimensional...
A new structure of tunneling gyroscope which is high-accuracy and low-range was presented in this paper, as well as the structure and the operating principles of this gyroscope were analyzed. Besides, the simulations were made in this paper which is close to the principle. Then the structure was fabricated by MEMS technological processes. And its tunneling effect was tested by HP4156C high precise...
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