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This paper reports on the extraction of residual stress in surface-micromachined nickel thin films of electrostatically actuated fixed-fixed beams using a wafer-scale technique. The distribution of residual stress for 87 beams on a 4-in quarter wafer piece is presented. The residual stress ($\sigma _{0}$ ) is determined from the best fit of the displacement-voltage curves predicted by a computationally...
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