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Silicon carbon nitride (SiCN) nanowires, nanorods and nanotubes have gained much attention due to their excellent field emission and photoluminescence properties. These nanostructures were usually grown using catalysts at high temperature (800–1000 °C). In this paper, synthesis of SiCN nanostructures at a temperature less than 500°C is reported. Various kinds of SiCN nanostructures were synthesized...
Assited by Co as catalyst, an interesting structure, dandelion-shaped SiCN rods, was synthesized using microwave plasma chemical vapor deposition method with gas mixtures of CH4, H2 and N2 as precursors and Si chips inserted in the sample holder at symmetrical positions around the specimen as additional Si sources. Scanning electron microscopy shows each rod has not only a column about 0.4~0.8 mum...
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