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We present a new high-accuracy digital-to-analog (DA) actuator using a load spring, specially designed to compensate displacement errors caused by fabrication errors. The compensated linear DA actuator is capable to change the slope of input-output modulation line in order to compensate fabrication errors. We design, fabricate, and characterize three different prototypes: one uncompensated design...
We present a high-accuracy digital-to-analog (DA) actuator using a linear load spring capable of compensating the output displacement errors caused by fabrication errors. The load spring is designed to modify the modulation line slope in the presence of fabrication errors, thus reducing the output displacement errors. We compare three prototypes including the uncompensated design, the compensated...
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