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We present an atomic force microscopy (AFM) probe with integrated piezoresistive read-out. The probe consists of a micromachined cantilever with a tip at the end. The cantilever is a multilayer structure with its thickness defined by etch-stop and the bending controlled by fitting the thicknesses of the thin films constituting the cantilever. The AFM probe has an integrated tip made of a thick sputtered...
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