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Artificial bacterial flagella (ABF) are swimming microrobots that mimic the swimming motion of bacteria. The helical swimmer consists of an InGaAs/GaAs/Cr helical nanobelt tail fabricated by a self-scrolling technique with dimensions similar to a natural flagellum, and a thin soft-magnetic metal ??head?? consisting of a Cr/Ni/Au multi-layer. The swimming locomotion of ABF is precisely controlled in...
In this paper, we report an in-situ nanosoldering technique to make electrically conductive interconnections between three-dimensional (3D) helical micro-/nanostructures and electrodes for the nanorobotic assembly of nanoelectromechanical systems (NEMS) using gold nanoparticle ink. 3D helical nanobelts are placed onto pre-fabricated gold electrodes using nanorobotic manipulation inside a scanning...
We present the use of integrated semiconductor nanocoils for conductometric sensors. The three-dimensional structures are made of an n-type InGaAs/GaAs bilayer. They are suspended over the chip surface and connected to one electrode on each side. The process is based on conventional batch microfabrication techniques. Process and design features that are critical for the realization of this type of...
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