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Although ultra-scaled III–V Gate-all-around (GAA) nanowire (NW) MOSFETs have been studied for their immunity to short channel effects, the degradation mechanisms, such as, hot carrier injection (HCI) in the NW MOSFETs are yet to be studied systematically. In this paper, we examine how HCI affects the NW device performance (ΔVth, ΔSS in both stress and recovery) at different bias conditions, and demonstrate...
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