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This paper described relative humidity (RH) sensing with ZnO based Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of the FBAR decreased in a two-stage manner as the RH increased in the environment. For low RH (RH<;;50%), a frequency shift of 2.2 kHz per 1% RH change was observed. This effect was attributed to water molecules replacing the adsorbed oxygen on the ZnO surface, thus...
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