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We have developed a on-chip double-shielded quantum Hall device and a double-shielded chip-carrier. The device in conjunction with the carrier will realize impedance standard based on the quantum Hall effect. In this configuration, the Hall bar is covered by separated on-chip shields and shields of the chip carrier to retrieve the leakage current. In this paper, we show detail of the QHR device fabrication...
Electrical separation-walls with a high aspect ratio are fabricated in the narrow space between mirror-drive electrodes. With these walls between adjacent channels, each MEMS mirror successfully operates with very low electrical interference.
This paper presents experimental proof of energy harvesting with MEMS-based vibrational devices. To clarify the effect of the coupling of vibration of MEMS devices and electrical field of electrets for current generation, a slit-and-slider structure was developed. This structure enables to combine the MEMS devices and electrets after their vibrational and electrical properties have been characterized...
We developed a dry process for the removal of gold oxide formed during oxygen plasma exposure. This technique features vacuum annealing at over 270degC to desorb oxygen from the gold oxide. This vacuum annealing eliminates the incubation period to achieve the conformal film growth.However, when gold and HCl(aq) soluble material such as aluminum coexist on the same surface or when there are fragile...
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