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We present the underlying physics in the resonance frequency characteristics of a bare quartz crystal microbalance (QCM) and a QCM-micro pillar based coupled resonator sensor (QCM-CRS) when they were subjected to pressure changes in a vacuum chamber. The QCMs experienced an increase in resonance frequency with decrease in pressure due to an inverse mass loading effect introduced on the QCM surface...
Surface acoustic wave (SAW) sensors extensively employ mass loading effect of a sensing film coated over the surface of a SAW device. We report experimental and simulation results of mass loading by SU-8 micropillars (in place of sensing film) attached normal to the surface of SAW resonators. For certain size of micropillars, we have observed an increase in the resonance frequency of the resonator,...
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