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An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale...
X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two...
We report a dual-color total-internal-reflection (TIR)-based chip that can generate two overlapping evanescent fields with different wavelengths for simultaneous imaging of two types of fluorophores. We derived a general relationship among the dimensions of the components of the chip to guarantee the overlap of two evanescent fields. Optical simulation results also confirm the generation and overlap...
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