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High power 28GHz millimeter-wave radiation was applied to the fabrication of bulk AlN, Si3N4 and Al2O3. The millimeter-wave radiation enables to sinter these ceramics rapidly at several 100°C lower temperature than the conventional method. The rapid sintering is attributed to the enhancement of atomic migration due to the “non-thermal effect” of millimeter-wave. It is indicated that the millimeter-wave...
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