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The rapid progress in microsystems technology is increasingly supported by various modeling methodologies and simulation tools. A coupled-field analysis procedure is established to analyze a multi-degree of freedom accelerometer. The proposed sensor dimensions are 1.5times1.5times0.5 mm3 (LtimesWtimesT) and the beam size is 950times80times10 mum3 (LtimesWtimesT). The effect of electrical heating in...
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