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This paper presents a comprehensive procedure for the design and implementation of thin film heaters manufactured on glass substrates. The thermal and electrical behavior of the heaters have first been simulated and proper design solutions have been adopted for increasing the thermal resistance of the heaters, thus decreasing their power consumption. Trenches were adopted in order to thermally isolate...
This paper presents for the first time an accurate thermal characterization of thin film heaters manufactured on glass substrates. The characterization has been performed on Cr/Al/Cr meandered heaters. Techniques commonly adopted for measuring the temperature coefficient of resistance, the thermal resistance and thermal capacitance in the case of Si-based microheaters have been conveniently modified...
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