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This paper presents an analytical model for support loss in clamped-free (C-F) and clamped-clamped (C-C) micromachined beam resonators with in-plane flexural vibrations. In this model, the flexural vibration of a beam resonator is described using the beam theory. An elastic wave excited by the shear stress of the beam resonator and propagating in the support structure is described through the 2D elastic...
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