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This chapter provides a review on optical microscopy and atomic force microscopy (AFM) based material property measurement at nanoscale. Originally, the images generated by optical microscopies were captured by a photographic film; now, with modern developments in complementary metaloxide‐semiconductor (CMOS) and charge‐coupled device (CCD), direct capture of digital images on a computer screen is...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by combining MEMS microfabrication and AFM nanolithography. The fabrication process began with the patterning of microscale reservoirs and electrodes on an oxidized silicon chip using conventional MEMS techniques. A nanochannel, approximately 30µm long with a small semi-circular cross-sectional area of 20nm...
One of the major limitations for Atomic Force Microscopy (AFM) based nanoparticle pushing is that AFM only has one sharp tip as the end-effector. The interaction force between the nanoparticle and the tip is applied through a single point, which often leads the AFM tip to slip-away from the nanoparticle due to their small touch area. Then several minutes is needed to relocate the missed nanoparticle...
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