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Miniature Rectangular Coaxial Lines (RCL) fabricated on silicon substrate using standard silicon 0.18um CMOS processing technologies are achieved. Also a valid method for de-embedding test structure is proposed. The measured results show that the insertion loss of 1.7dB/mm and the return loss of 10dB at 20GHz are obtained. It is believed that the RCL with high isolation and low insertion loss will...
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