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This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
This work presents in-situ controlled growth of carbon nanotubes (CNTs) by local synthesis using silicon MEMS structures. The site-specific local synthesis and assembly of CNTs took 20 ~ 60 seconds experimentally to connect across a 5 ~ 10 mum gap to accomplish integrated CNTs. Using this method, we can now control the number of CNT connections between the silicon structures. The electrical properties...
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